Munros electron beam software ltd company profile and. Munro s electron beam software limited is an active company incorporated on 30 july 1991 with the registered office located in london, greater london. In this presentation the ionoptical design of a beam linespectrometer system will be. Simulation software for designing electron and ion beam equipment. Munro s electron beam software ltd was founded by eric munro, john rouse and xieqing zhu in july 1991, and registered as a united kingdom company. The simulation includes the modelling of cathode emission and the effects of volumetric space charge. Munros electron beam software limited free company information from companies house including registered office address, filing history. Expert consultancy services in the design of electron and ion beam devices and systems. Design of practical deflection field in nanometerscale.
Simulation software has been written to calculate the properties of electron guns which have flat cathodes and a fully threedimensional electrode structure. Rouse, eric munro, liping wang, haoning liu munro s electron beam software ltd. Mebs provides specialised software for the computer aided design of electron and ion optical systems. He has much experience in the field of electron optics, having worked for hitachi ltd. An apparatus for projection lithography is disclosed. Munros electron beam software ltd, 14 cornwall gardens. Computational modeling techniques in chargedparticle optics. Currently registered at 14 cornwall gardens sw7 4an, london the company has been in the business for 29 years. Request pdf simulation software for designing electron and ion beam equipment electron and ion beam equipment. Founded in 1991, munro s electron beam software, classified under reg no. Munro s electron beam software ltd was founded in 1991.
Our software is used worldwide by many electron microscope manufacturers and by manufacturers of charged particle optical equipment for the semiconductor industry. Thermal field emission sources and optics for gaussian electronbeam lithography. We then describe the two main simulation software packages that have been used in the electron optical design 1 projection, for optimizing the aberrations to fifthorder, including the electron lenses, deflectors, stigmators and dynamic focus coils, and 2 boerscha, for computing the combined effects of the aberrations and discrete. Munros electron beam software limited in london sw7 4an. Munro, eric chairman munros electron beam software ltd. We consider low energy beam of 5 kev, since larger aperture angle is needed to suppress diffraction effect at low energy. The apparatus has at least one magnetic doublet lens. Us7282727b2 electron beam directed energy device and. Simulation of coulomb interaction effects in electron sources. Develops and provides software for simulation, design and optimisation of charged particle optical systems, especially electron microscopes, and equipment for the semiconductor manufacturing industry. Munro, a set of computer programs for calculatin g of properties electron lenses. For designing new and better electron and ion beam columns for use at the cutting edge of these technologies, accurate and sophisticated simulation software is indispensable, and the development. Genya graduated from tohoku university with an ms in physics. Learn about working at munro s electron beam software ltd.
He has worked on theory and software for high order aberrations, discrete coulomb interaction effects, and differential algebraic methods, and has published over 50 papers. Beam electronics and software engineering innovation. Munro s electron beam software limited free company check. On a scientific level, mebs has contributed to the development of aberration theory of general combinations of electron lenses and deflectors, multipole systems, electron guns. Munro s electron beam software limited free company information from companies house including registered office address, filing history, accounts, annual return, officers, charges, business activity. Mebs software packages are considered industry standards and are used by the majority of u. Zhu munros electron beam software ltd, 14 cornwall gardens, london sw7 4an, u. Munros electron beam software limited officers free. Simulation of electron optical systems by differential. Munro, munros electron beam software software catalogue, mebs ltd, 2010. The field size of electron optics is limited by offaxis aberrations, prohibiting the. The device includes one or more accelerating plates with holes aligned for beam passage.
Eric munro, has over 100 personyears of expertise in electron optical design, simulations and analysis. Munros electron beam software limited overview free. A novel method for higher order aberration correction in. Munro s electron beam software limited has been running for 28 years. Cpo10 abstracts cpo10 tenth international conference on. A method and apparatus is disclosed for an electron beam directed energy device. S, european and asian manufacturers of electron and ion beam equipment for the design and analysis of electron microscopes and electron lithography machines, e beam testers, crts, photomultiplier tubes, e beam welding guns, ion beam systems, aberration. Humphries, three dimensional charged particle optics and gun design, field precision llc, crc press, albuquerque, new mexico u. Eric munro, has over 100 personyears of expertise in electronoptical design, simulations and. Elsevier microelectronic engineering 4142 1998 163166 microectroic engineering tolerancing of electron beam lithography columns h. Mebs program 15 showed that at this convergence angle, diffraction aberration is dominant over beam size on the.
The device consists of an electron gun with one or more electron beams. Krome studios melbourne, originally melbourne house, was an australian video game development studio founded in 1980 by alfred milgrom and naomi besen and based in melbourne, australia. Munros electron beam software ltd company profile and news. See who you know at munro s electron beam software ltd, leverage your professional network, and get hired. What is the abbreviation for munro s electron beam software. Abstract in computing the optical properties of electron and ion beam columns, the actual beam blur needs to be obtained from the computed aberration coefficients of the column and the beam parameters. John andrew rouse currently holds the position of a secretary in munro s consultancy services ltd.
Optics is a software package developed by mebs ltd. Simulation software beamish for the design of chargedparticle optical instruments. Comprehensive analysis of electron optical design of scalpel. Our sister company munro s electron beam software ltd. Electronbeam sources and chargedparticle optics 1995. Develops and provides software for simulation, design and optimisation of charged particle. Our seven software families each consist of a base package, which provides the core functionality, and a range of upgrade modules which integrate seamlessly. Igun can handle 2d rectangular and axisymmetric problems with space charge considerations. Electron and ion beam equipment play a vital role in the semiconductor manufacturing and nanotechnology industries.
Abstract over many years, we have developed electron source simulation software that has been used widely in the electron optics community to aid the development of rotationally symmetric electron and ion guns. View munro, erics profile on linkedin, the worlds largest professional community. Northavon business centre, dean road, yate, bs37 5nh. Munro s electron beam software ltd, 14 cornwall gardens, london sw7 4an, u. Electron optics for low energy electron microscopy. In 1991 he founded his own company, munro s electron beam software ltd. Mebs develops the software packages and the whole of the mebs software suite is available to mcs designers and. Xieqing is now enjoying his retirement, but three members of the original team, eric, john and haoning pictured on the left are still active within the company. Simulation software for designing electron and ion beam.
Munro s electron beam software limited 02633393 company. The company develops customized electron beam tools and provides technical support for electron beam applications. Munro, eric chairman at munros electron beam software ltd and owner, munros electron beam software ltd london, united kingdom 204 connections. The studio operated independently from 1987 until 1999, when it was acquired by infogrames, who changed the name to infogrames melbourne house. Specialised software for the computer aided design of electron and ion optical systems. This article describes methods for the computer aided design of electron and ion beam columns for the integrated circuit ic manufacturing industry. Munros electron beam software limited free company check. Munros electron beam software limited company profile endole. The companys line of business includes designing, developing, and producing prepackaged computer software. Volumetric space charge effects are significant in such guns and a three dimensional solution of poissons equation is required. Munros electron beam software limited filing history. Simulation of electron behavior in pig ion source for 9mev.
Tolerancing of electron beam lithography columns sciencedirect. Electron and ion optical design software for integrated. List of companies where john andrew rouse was involved. A read is counted each time someone views a publication summary such as the title, abstract, and list of authors, clicks on a figure, or views or downloads the fulltext. John andrew rouse profile free company director check. An aperture scatter filter is interposed between the two lenses of the magnetic doublet lens. Mcs aim to make state of the art software tools and design expertise available to charged particle optical system manufacturers. Ion trajectories in electronimpact ion sources of a quadrupole mass spectrometer were simulated using a computer program co3d, munros electron beam software ltd. The techniques described include computation of field distributions in electron lenses and deflectors, electron trajectories and aberrations, dynamic corrections, effects of discrete coulomb interactions, design of electron guns, treatment of. Mebs abbreviation stands for munro s electron beam software. Electron optics for low energy electron microscopy marian mankos a, david adler a, lee veneklasen and eric munro b a klatencor, 160 rio robles, san jose, ca, u. Simulation methods for multipole imaging systems and. Pdf electron optics for low energy electron microscopy.
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